Nanofabrication

SensorMetrix personnel are trained and qualified users at the UCSD’s Nano3 Nanofabrication User Facility. Nano3 Clean Room facilities contain a complete suite of fabrication tools, including Nano Imprint Lithography (NIL), an inductively coupled plasma (ICP) etch tool from Oxford PlasmaPro 100 ICP180, Spin Coaters, Scanning Electron Microscope (SEM), scanning profilometer,  and thin film deposition tools including RF sputtering, & electron beam evaporation.